System Level Modelling of CNT based Mechanical Sensor

This article presents a system level model of carbon nanotube (CNT) based mechanical sensor, which consists of micro-electro-mechanical (MEMS) platform that is served to actuate single-axis force and single CNT is placed between the movable and fixed electrodes. The change in conductivity of CNT, when strain is applied, is used to measure force or displacement. The simulation of the whole sensor element will be achieved by using the framework of hardware description languages (VHDL-AMS and SystemC-AMS) that uses compact models to describe sub-elements performing heterogeneous functions. The CNT piezoresistive compact model presented in the article is based on the analytical model and the simulations results from density functional theory (DFT). The macromodel of the MEMS platform is build using mode superposition technique. The results of the system simulations are presented and discussed in the article.